The department-owned facilities combined with the facilities under East Taiwan Nanotechnology Research Center forms the complementary research facility system for the department. The system fulfills easily the needs for facilities in teaching and research activities of our department. With the aid of general facility reservation system built by our Science and Engineering Institute, we can maximize the utilization of time slots for all facilities and number of users, monitoring the licenses issued, and securing the opportunities for license acquisition and for the self-operation of the facilities for all graduate students that are licensed.